공급가능부품

MAXPLUS

CUSOTMER CENTER

Tel031-667-3975
Fax031-667-3922 Emailghyum2004@ maxpluseng.co.kr
- 월 ~ 금 : 오전9시 ~ 오후6시
- 토, 일, 공휴일 : 휴무

AMAT장비

PART
No 품 명 품 번 재 질 메이커 비고
1 PLATE,BLOCKER,TxZ 0021-35744 AL6061-T6 AMAT  
2 BOCKER PLATE 200mm BW 0020-30111 AL6061-T6 AMAT  
3 SHOWERHEAD 6" (TEOS) 0020-10771 AL6061-T6 AMAT  
4 SHOWERHEAD 8" (PASSIVATION) 0021-30797 AL6061-T6 AMAT  
5 SHOWERHEAD (EC LID) 0020-42286 AL6061-T6 AMAT  
6 FACE PLATE (SA) 0021-01572 AL6061-T6 AMAT  
7 BOCKER PLATE,BW, 200mm 0020-16215 AL6061-T6 AMAT  
8 GAS BOX 0040-09095 AL6061-T6 AMAT  
9 PERF PLATE 150mm 0020-30406 AL6061-T6 AMAT  
10 BOCKER PLATE (TEOS) 0020-32036 AL6061-T6 AMAT  
11 HDTXZ LID PLATE 0040-37667 AL6061-T6 AMAT  
12 LID PLATE 0040-02132 AL6061-T6 AMAT  
13 BOCKER PLATE 0020-61943 AL6061-T6 AMAT  
14 PUMPING PLATE 0020-42083 AL6061-T6 AMAT  
15 GAS BOX 0040-02520 AL6061-T6 AMAT PRODUCER
16 GAS BOX 0040-00796 AL6061-T6 AMAT PRODUCER
17 LIFT HOUSING 0020-33677 AL6061-T6 AMAT  
18 BOCKER PLATE DxZ 0021-09914 AL6061-T6 AMAT  
19 LID PUMPING PLATE 0040-61877 AL6061-T6 AMAT  
20 CLAMP RING PLATE 0021-02797 SUS304 AMAT  
21 SLIT V/V DOOR 0020-20340 AL6061-T6 AMAT  
22 PADESTAL 0021-20718 SUS316 AMAT  
23 DARK SPACE SHILD 0020-29343 AL6061-T6 AMAT  
24 EDGE RING ASS,Y,TxZ 200mm 0010-36522 AL6061-T6 AMAT  
25 COVER RING 8" 0020-27804 SUS316L AMAT  
26 RESTRAINT PIN 0020-28715 SUS316L AMAT  
27 HONEYCOMB 0020-23811 AL6061-T6 AMAT  
28 LIFTER PIN 0020-38753 AL6061-T6 AMAT  
29 SLIT V/V LINER 0020-76301 AL6061-T6 AMAT  
30 SLIT V/V DOOR 0020-70643 AL6061-T6 AMAT  
31 HANDLER(AME) 26-82317-00 AL6061-T6 AMAT  
32 SSGD COVER 0020-34326 SUS316L AMAT  
33 ADAPTOR TOP EGEC(M) 0020-30190 AL6061-T6 AMAT  
34 CYLIDER EXTERNAL INSERT 0020-30347 AL6061-T6 AMAT  
35 BASE FLANGE 0020-09030 AL6061-T6 AMAT  
36 EXTERAL CATHODE 0020-38055 AL6061-T6 AMAT  
37 GAS FLOWER 0050-31101 SUS304 AMAT  
38 CHAMBER LINER 0021-10223 AL6061-T6 AMAT  
39 LID SCREW 3690-03341 SUS304 AMAT  
40 SLIT DOOR LINER (DPS) 0020-52965 AL6061-T6 AMAT  
41 EXTERNAL TUBE(R2) 0020-33881 AL6061-T6 AMAT  
42 HOT INNER CYLINDER (R2) 0020-33883 AL6061-T6 AMAT  
43 X-BAR CYLINDER 0020-31613 AL6061-T6 AMAT  
44 TOP LID 0020-04194 AL6061-T6 AMAT  
45 SUPER E WALL LINER 0020-33998 AL6061-T6 AMAT  
46 BASE EXTENSION ESC 0020-32046 AL6061-T6 AMAT  
47 ® EMAX SGD PLUG 0040-82517 AL6061-T6 AMAT  
48 ® SGD PLUG 0040-51159 AL6061-T6 AMAT  
49 CLAMP RING 0020-01416 SUS316 AMAT  
50 CLAMP, SHD COLLIMATOR LOWER 8" 0020-22492 SUS316 AMAT  
51 CLAMP, SHD COLLIMATOR UPPER 8" 0020-22493 SUS316 AMAT  
52 CLAMP, SHD 8" WAFER 0020-23041 AL6061-T6 AMAT  
53 ADAOTOR TIN 8" WAFER,16.00 CHAMB, 0020-22982 SUS316 AMAT  
54 ADAPTOR,13" SOURCE 0020-23042 AL6061-T6 AMAT  
55 ADAPTOR,13" SOURCE,WIDE BODY 0020-23046 AL6061-T6 AMAT  
56 HOOP,LIFT 8",HIGH TEMP 0020-23259 SUS316 AMAT  
57 Ti PEDESTAL 8" 0020-24101 Ti AMAT  
58 COVER,RING 8" 0020-24914 SUS316 AMAT  
59 CLAMP RING,8" ,HOT,SNNF,AL 0020-26112 Ti AMAT  
60 COVER, GAS TRENCH 0020-26967 AL6061-T6 AMAT  
61 DISK 8" SHUTTER 0020-26973 Ti AMAT  
62 CLAMP RING 8" 0020-27690 SUS316 AMAT  
63 COVER,8" PEDESTAL,ADV-101 0020-28754 SUS304 AMAT  
64 DISK,8",SUTTER,JMF 0020-28867 Ti AMAT  
65 HUB,8" SHUTTER 0020-28906 SUS316 AMAT  
66 COVER,8" PEDESTAL,ADV-101 0020-28937 SUS304 AMAT  
67 SHIELD DARKSPACE,0.751" 0020-29320 SUS316 AMAT  
68 PUMPING PLATE 8",WxZ 0020-42082 AL6061-T6 AMAT  
69 LINER,GDP,R2 OXIDE 0020-34694 AL6061-T6 AMAT  
70 SHIELD, INNER, TxZ 0021-02983 AL6061-T6 AMAT  
71 OBS,SHIELD, INNER,TxZ 0021-35752 AL6061-T6 AMAT  
72 PERF,PLATE,TxZ 200mm 0021-35869 AL6061-T6 AMAT  
73 EDGE RING, TxZ 200mm 0021-35946 AL6061-T6 AMAT  
74 INSERT RING,DxZSACVD 0021-02395 AL6061-T6 AMAT  
75 LINER,CATHODE,OXIDE ETCH 0021-09104 AL6061-T6 AMAT  
76 OBS,INSERT, CHB,TxZ 0200-35579 AL6061-T6 AMAT  
77 RING,WAFER LIFT 0020-10059 SUS304 AMAT  
78 PERF,PLATE, OX 200mm(TEOS) 0020-10117 AL6061-T6 AMAT  
79 CLAMP RING 8" TiN 0020-23400 SUS316 AMAT  
80 COVER,SOLID,SHIELD PRECLEAN 0020-23555 AL6061-T6 AMAT  
81 COVER,RING 8" Ti 101 COVERAGE 0020-27309 Ti AMAT  
82 SHIELD,CLAMP, DARKSPACE,0.727 0020-29343 SUS316 AMAT  
83 PERF,PLATE 200mm BW 0020-30407 AL6061-T6 AMAT  
84 PERF,PLATE 200mm ,OX 0020-33538 AL6061-T6 AMAT  
85 PERF,PLATE 200mm,SILANE 0020-30797 AL6061-T6 AMAT  
86 BLOCKER PLATE, DxZ 0020-34445 AL6061-T6 AMAT  
87 BLOCKER PLATE, 100 EH 0020-34606 AL6061-T6 AMAT  
88 BLOCKER,PERF ,SILOX 8" 0020-34775 AL6061-T6 AMAT  
89 PERF, PLATE, OX 200mm 0020-39369 AL6061-T6 AMAT  
90 FACEPLATE,SiN,XG,DxZ DCVD 0021-00041 AL6061-T6 AMAT  
91 FACEPLATE,TEOS,DxZ DCVD 0021-00042 AL6061-T6 AMAT  
92 BLOCKER PLATE ,N2,Tin ,GIGA-FILL,SACVD 0021-01569 AL6061-T6 AMAT  
93 BLOCKER PLATE ,HE,Tin ,GIGA-FILL,SACVD 0021-01570 AL6061-T6 AMAT  
94 FACEPLATE,GIGA-FILL SACVD(BPSG) 0021-01572 AL6061-T6 AMAT  
95 FACEPLATE,GIGA-FILL SACVD 0021-03489 AL6061-T6 AMAT  
96 OBS,FACEPLATE,DxZ DCVD 0021-09759 AL6061-T6 AMAT  
97 DISK,8" B101,SST,SHUTTER 0021-20042 SUS316 AMAT  
98 CLAMP RING 8" HOT,SNNF 0021-20399 Ti AMAT  
99 COVER,8" PEDESTAL,LOWER, B101 0021-20718 SUS304 AMAT  
100 BLOCKER,PERF,SILANE,NITRIDE550 0021-39748 AL6061-T6 AMAT  
101 LIFT PIN 0020-34040 AL6061-T6 AMAT  
102 LIFT PIN 0020-34041 AL6061-T6 AMAT  
103 BUFFER BLADE 8" 0020-70285 AL6061-T6 AMAT  
104 SLIT V/V LINER 0021-09718 AL6061-T6 AMAT  
105 BLOCKER PLATE, DxZ 0021-09914 AL6061-T6 AMAT  
106 PLATE,PERF,150mm,GIANT GAP 0020-30086 AL6061-T6 AMAT  
107 BLOCKER PLATE, SILANE,200mm 0020-10936 AL6061-T6 AMAT  
108 BLOCKER PLATE 8" EC WxZ 0020-42285 AL6061-T6 AMAT  
109 PERF, PLATE 8" ,EC WxZ 0020-42287 AL6061-T6 AMAT  
110 FACEPLATE,DxZ DCVD 0021-38119 AL6061-T6 AMAT  
111 FACEPLATE,(SILANE),200mm 0021-03637 AL6061-T6 AMAT  
112 PUPING CHANNEL 0021-03739 AL6061-T6 AMAT  
113 INSERT RING 0021-06569 AL6061-T6 AMAT  
114 FACEPLATE,(SACVD),200mm 0021-08015 AL6061-T6 AMAT  
115 GAS BOX,DxZ,DCVD 0021-09760 AL6061-T6 AMAT  
116 PEDESTAL SHIELD 8" PRECLEAN 0020-22844 AL6061-T6 AMAT  
117 CLAMP RING 8" SIX "FEET" 0020-25279 SUS316 AMAT  
118 Ti PEDESTAL 8" 0020-27123 Ti AMAT  
119 CLAMP RING, 6" 0020-27944 Ti AMAT  
120 COVER,8" PEDESTAL,ADV-101 0020-28937 SUS304 AMAT  
121 CLAMP RING 8" SNNF,E/E,3.378mm 0020-29015 SUS316 AMAT  
122 BOCKER PLATE 6","SX" TEOS OXIDE 0020-30447 AL6061-T6 AMAT  
123 PEDESTAL  8" ,101,COVERAGE 0020-24913 SUS316 AMAT  
124 RING,ISOLATOR,TxZ,200mm,SNNF 0021-35749 SUS316 AMAT  
125 GAS DISTRIBUTION PLATE,SPUTTER 0020-09933 AL6061-T6 AMAT  
126 BUFFER BLADE 6" 0020-21114 AL6061-T6 AMAT  
127 HOUSING QUARTZ TUBE 0020-30335 ACETAL AMAT  
128 BLADE,6" HTHU XFER 0020-24840 AL6061-T6 AMAT  
129 PUPING PLATE 8", FC,WxZ 0020-42082 AL6061-T6 AMAT  
130 BUFFER BLADE 8" 0020-70285 AL6061-T6 AMAT  
131 INSERT BASE,ALUM,150/200mm,flat 0020-31147 AL6061-T6 AMAT  
132 LIFT PIN 0020-31633 AL6061-T6 AMAT  
133 SLIT V/V DOOR 0020-32312 AL6061-T6 AMAT  
134 INSERT,SLIT V/V-BUFFER 0021-02747 AL6061-T6 AMAT  
135 CLAMP RING, 8",SNNF,SST 3.378,AL 0020-20112 SUS316 AMAT  
136 CLAMP RING, 8" HOT,SNNF,AL 0020-24406 Ti AMAT  
137 CLAMP RING, 8",SEMI NOTCH, 0021-06097 SUS316 AMAT  
138 CLAMP RING, 8",SNNF,TiN 0021-06101 SUS316 AMAT  
139 CLAMP RING, 8",SNNF,CU, E/E 2.5 0021-21320 TI AMAT  
140 CLAMP RING 8" SNNF, SST 0021-21936 SUS316 AMAT  
141 PEDESTAL  8" ,101,COVERAGE 0021-22028 SUS316 AMAT  
142 COVER,RING 8" B101 Ti,10.5 0021-22602 Ti AMAT  
143 CLAMP RING, 8",SEMI NOTCH,(Ti) 0021-06148 SUS316 AMAT  
144 OUTPUT MANIFOLD 0021-10296 AL6061-T6 AMAT  
145 GAS BOX PLATE 0020-30673 AL6061-T6 AMAT  
146 INPUT MANIFOLD 0021-23550 AL6061-T6 AMAT  
147 GAS BOX(W) 0040-32073 AL6061-T6 AMAT  
148 PUMPING PLATE ASS,Y ,(PTEOS) 0190-09263 AL6061-T6 AMAT  
149 ADAPTOR,Hi-POWER,TTN,WB,H2O 0040-21705 AL6061-T6 AMAT  
150 CHUCK 6" 0020-21706 AL6061-T6 AMAT  
151 PLATE 6" CCD VAC,SEAL 0020-23593 AL6061-T6 AMAT  
152 LIFTER 6" ORIENTER 0020-41026 AL6061-T6 AMAT  
153 COVER,INSULATOR SOURCE 13" 0020-20171 G-10 AMAT  
154 MOUNT,LIFTER BRG 0020-20667 AL6061-T6 AMAT  
155 PLATE, CONTACT,DC SOURCE 13",L 0020-21485 BRASS AMAT  
156 LIFT FINGER 101% TiN,WIDE BODY 0020-23208 SUS316 AMAT  
157 FRAME SOURCE G3/G4, FLAT TARGET 0020-23316 G-10 AMAT  
158 HEATER MOUNTING BLOCK 0020-23437 AL6061-T6 AMAT  
159 LIFT HOOP 6" ,W/B CH 0020-28258 SUS316 AMAT  
160 DISK 6" ADV 101 SHUTTER 0020-28392 Ti AMAT  
161 DUMMY TARGET, FLAT 13" 0020-75862 AL6061-T6 AMAT  
162 PEDESTAL 6" ADV 101,FULL COV, 0021-20572 SUS316 AMAT  
163 CLAMP RING, 8",SNNF,Ti,3.404 0020-27702 TI AMAT  
164 PLATE,REFLECTOR,200mm,XE,CHAM 0021-35008 AL6061-T6 AMAT  
165 PLATE,EDGE COVER  0200-10169 AL203 AMAT  
166 CLAMP RING, 8",SNNF,PADDED,HTHU 0020-27205 TI AMAT  
167 RING WAFER LIFT 200mm 0020-10192 SUS304 AMAT  
168 RING WAFER LIFT  0020-10059 SUS304 AMAT  
169 PLTE, PERF,OX 200mm(TEOS) 0020-10117 AL6061-T6 AMAT  
170 INSERT,SLIT V/V ,SHO 0020-19003 AL6061-T6 AMAT  
171 LIFT PIN 0020-31633 AL6061-T6 AMAT  
172 FLANGE, ADAPTOR Z-DRIVE COOLD 0020-39119 AL6061-T6 AMAT  
173 PUPING PLATE 8", SILANE 0020-30059 AL6061-T6 AMAT  
174 GAS BOX,456,PL 0040-09091 AL6061-T6 AMAT  
175 FILOW BLOCK BRACKET 0040-22203 AL6061-T6 AMAT  
176 PUMPING PORT RING PRODUCER 0020-08817 TEFRON AMAT  
177 SLIT V/V DOOR 0020-20340 AL6061-T6 AMAT  
178 LIFTER HOOP 8" 0020-22242 AL6061-T6 AMAT  
179 COOLIMATOR 8" 0020-20430 AL6061-T6 AMAT  
180 LIFTER 8" (TC) 0020-23387 AL6061-T6 AMAT  
181 SUSCEPTOR 200mm  0020-30784 AL6061-T6 AMAT  
182 LIFTER HOOP 8"ADV ,101, W/B CH 0020-27103 SUS316 AMAT  
183 SUSCEPTOR 150mm  0020-30754 AL6061-T6 AMAT  
184 RING,SYM,GAS DIST,24PORTS,ULTIMA 0040-04650 AL6061-T6 AMAT  
185 CENTER,GAS FEED BLK,TOP CLE,,ULTIMA 0040-34339 AL6061-T6 AMAT  
186 LIFTER HOOP 6" ,SHUTTER 0020-22570 SUS316 AMAT  
187 FRAME SOURCE G3, W/SIDE COOL'G 0020-27808 G-10 AMAT  
188 LID PLATE,TxZ 0021-35867 AL6061-T6 AMAT  
189 ADAPTOR ,Ti/TiN 16",CHAMB 0040-21289 SUS316 AMAT  
190 ARM WELDMENT,SOURCE ,WIDE BODY  0040-76073 SUS316 AMAT  
191 COVER,RING 200mm SLIP Ta(N),Ti 0020-19708 Ti AMAT  
192 ORIENTAL BELLOWS 0020-22910 SUS330&350 AMAT  
193 BLADE 8" SHUTTER 101 0020-27668 SUS316 AMAT  
194 EDGE RING 200mm TxZ 0020-48700 AL6061-T6 AMAT  
195 DISK,8",Ti B101 PROCESS VACTRA 0021-20437 Ti AMAT  
196 SHIELD,UPPER,STRAIGHT SIP II 200mm 0021-23332 Ti AMAT  
197 SHIELD,UPPER,STRAIGHT SIP II 200mm 0021-23332 Ti AMAT