| No | 품 명 | 품 번 | 재 질 | 메이커 | 비고 |
|---|---|---|---|---|---|
| 1 | PLATE,BLOCKER,TxZ | 0021-35744 | AL6061-T6 | AMAT | |
| 2 | BOCKER PLATE 200mm BW | 0020-30111 | AL6061-T6 | AMAT | |
| 3 | SHOWERHEAD 6" (TEOS) | 0020-10771 | AL6061-T6 | AMAT | |
| 4 | SHOWERHEAD 8" (PASSIVATION) | 0021-30797 | AL6061-T6 | AMAT | |
| 5 | SHOWERHEAD (EC LID) | 0020-42286 | AL6061-T6 | AMAT | |
| 6 | FACE PLATE (SA) | 0021-01572 | AL6061-T6 | AMAT | |
| 7 | BOCKER PLATE,BW, 200mm | 0020-16215 | AL6061-T6 | AMAT | |
| 8 | GAS BOX | 0040-09095 | AL6061-T6 | AMAT | |
| 9 | PERF PLATE 150mm | 0020-30406 | AL6061-T6 | AMAT | |
| 10 | BOCKER PLATE (TEOS) | 0020-32036 | AL6061-T6 | AMAT | |
| 11 | HDTXZ LID PLATE | 0040-37667 | AL6061-T6 | AMAT | |
| 12 | LID PLATE | 0040-02132 | AL6061-T6 | AMAT | |
| 13 | BOCKER PLATE | 0020-61943 | AL6061-T6 | AMAT | |
| 14 | PUMPING PLATE | 0020-42083 | AL6061-T6 | AMAT | |
| 15 | GAS BOX | 0040-02520 | AL6061-T6 | AMAT | PRODUCER |
| 16 | GAS BOX | 0040-00796 | AL6061-T6 | AMAT | PRODUCER |
| 17 | LIFT HOUSING | 0020-33677 | AL6061-T6 | AMAT | |
| 18 | BOCKER PLATE DxZ | 0021-09914 | AL6061-T6 | AMAT | |
| 19 | LID PUMPING PLATE | 0040-61877 | AL6061-T6 | AMAT | |
| 20 | CLAMP RING PLATE | 0021-02797 | SUS304 | AMAT | |
| 21 | SLIT V/V DOOR | 0020-20340 | AL6061-T6 | AMAT | |
| 22 | PADESTAL | 0021-20718 | SUS316 | AMAT | |
| 23 | DARK SPACE SHILD | 0020-29343 | AL6061-T6 | AMAT | |
| 24 | EDGE RING ASS,Y,TxZ 200mm | 0010-36522 | AL6061-T6 | AMAT | |
| 25 | COVER RING 8" | 0020-27804 | SUS316L | AMAT | |
| 26 | RESTRAINT PIN | 0020-28715 | SUS316L | AMAT | |
| 27 | HONEYCOMB | 0020-23811 | AL6061-T6 | AMAT | |
| 28 | LIFTER PIN | 0020-38753 | AL6061-T6 | AMAT | |
| 29 | SLIT V/V LINER | 0020-76301 | AL6061-T6 | AMAT | |
| 30 | SLIT V/V DOOR | 0020-70643 | AL6061-T6 | AMAT | |
| 31 | HANDLER(AME) | 26-82317-00 | AL6061-T6 | AMAT | |
| 32 | SSGD COVER | 0020-34326 | SUS316L | AMAT | |
| 33 | ADAPTOR TOP EGEC(M) | 0020-30190 | AL6061-T6 | AMAT | |
| 34 | CYLIDER EXTERNAL INSERT | 0020-30347 | AL6061-T6 | AMAT | |
| 35 | BASE FLANGE | 0020-09030 | AL6061-T6 | AMAT | |
| 36 | EXTERAL CATHODE | 0020-38055 | AL6061-T6 | AMAT | |
| 37 | GAS FLOWER | 0050-31101 | SUS304 | AMAT | |
| 38 | CHAMBER LINER | 0021-10223 | AL6061-T6 | AMAT | |
| 39 | LID SCREW | 3690-03341 | SUS304 | AMAT | |
| 40 | SLIT DOOR LINER (DPS) | 0020-52965 | AL6061-T6 | AMAT | |
| 41 | EXTERNAL TUBE(R2) | 0020-33881 | AL6061-T6 | AMAT | |
| 42 | HOT INNER CYLINDER (R2) | 0020-33883 | AL6061-T6 | AMAT | |
| 43 | X-BAR CYLINDER | 0020-31613 | AL6061-T6 | AMAT | |
| 44 | TOP LID | 0020-04194 | AL6061-T6 | AMAT | |
| 45 | SUPER E WALL LINER | 0020-33998 | AL6061-T6 | AMAT | |
| 46 | BASE EXTENSION ESC | 0020-32046 | AL6061-T6 | AMAT | |
| 47 | ® EMAX SGD PLUG | 0040-82517 | AL6061-T6 | AMAT | |
| 48 | ® SGD PLUG | 0040-51159 | AL6061-T6 | AMAT | |
| 49 | CLAMP RING | 0020-01416 | SUS316 | AMAT | |
| 50 | CLAMP, SHD COLLIMATOR LOWER 8" | 0020-22492 | SUS316 | AMAT | |
| 51 | CLAMP, SHD COLLIMATOR UPPER 8" | 0020-22493 | SUS316 | AMAT | |
| 52 | CLAMP, SHD 8" WAFER | 0020-23041 | AL6061-T6 | AMAT | |
| 53 | ADAOTOR TIN 8" WAFER,16.00 CHAMB, | 0020-22982 | SUS316 | AMAT | |
| 54 | ADAPTOR,13" SOURCE | 0020-23042 | AL6061-T6 | AMAT | |
| 55 | ADAPTOR,13" SOURCE,WIDE BODY | 0020-23046 | AL6061-T6 | AMAT | |
| 56 | HOOP,LIFT 8",HIGH TEMP | 0020-23259 | SUS316 | AMAT | |
| 57 | Ti PEDESTAL 8" | 0020-24101 | Ti | AMAT | |
| 58 | COVER,RING 8" | 0020-24914 | SUS316 | AMAT | |
| 59 | CLAMP RING,8" ,HOT,SNNF,AL | 0020-26112 | Ti | AMAT | |
| 60 | COVER, GAS TRENCH | 0020-26967 | AL6061-T6 | AMAT | |
| 61 | DISK 8" SHUTTER | 0020-26973 | Ti | AMAT | |
| 62 | CLAMP RING 8" | 0020-27690 | SUS316 | AMAT | |
| 63 | COVER,8" PEDESTAL,ADV-101 | 0020-28754 | SUS304 | AMAT | |
| 64 | DISK,8",SUTTER,JMF | 0020-28867 | Ti | AMAT | |
| 65 | HUB,8" SHUTTER | 0020-28906 | SUS316 | AMAT | |
| 66 | COVER,8" PEDESTAL,ADV-101 | 0020-28937 | SUS304 | AMAT | |
| 67 | SHIELD DARKSPACE,0.751" | 0020-29320 | SUS316 | AMAT | |
| 68 | PUMPING PLATE 8",WxZ | 0020-42082 | AL6061-T6 | AMAT | |
| 69 | LINER,GDP,R2 OXIDE | 0020-34694 | AL6061-T6 | AMAT | |
| 70 | SHIELD, INNER, TxZ | 0021-02983 | AL6061-T6 | AMAT | |
| 71 | OBS,SHIELD, INNER,TxZ | 0021-35752 | AL6061-T6 | AMAT | |
| 72 | PERF,PLATE,TxZ 200mm | 0021-35869 | AL6061-T6 | AMAT | |
| 73 | EDGE RING, TxZ 200mm | 0021-35946 | AL6061-T6 | AMAT | |
| 74 | INSERT RING,DxZSACVD | 0021-02395 | AL6061-T6 | AMAT | |
| 75 | LINER,CATHODE,OXIDE ETCH | 0021-09104 | AL6061-T6 | AMAT | |
| 76 | OBS,INSERT, CHB,TxZ | 0200-35579 | AL6061-T6 | AMAT | |
| 77 | RING,WAFER LIFT | 0020-10059 | SUS304 | AMAT | |
| 78 | PERF,PLATE, OX 200mm(TEOS) | 0020-10117 | AL6061-T6 | AMAT | |
| 79 | CLAMP RING 8" TiN | 0020-23400 | SUS316 | AMAT | |
| 80 | COVER,SOLID,SHIELD PRECLEAN | 0020-23555 | AL6061-T6 | AMAT | |
| 81 | COVER,RING 8" Ti 101 COVERAGE | 0020-27309 | Ti | AMAT | |
| 82 | SHIELD,CLAMP, DARKSPACE,0.727 | 0020-29343 | SUS316 | AMAT | |
| 83 | PERF,PLATE 200mm BW | 0020-30407 | AL6061-T6 | AMAT | |
| 84 | PERF,PLATE 200mm ,OX | 0020-33538 | AL6061-T6 | AMAT | |
| 85 | PERF,PLATE 200mm,SILANE | 0020-30797 | AL6061-T6 | AMAT | |
| 86 | BLOCKER PLATE, DxZ | 0020-34445 | AL6061-T6 | AMAT | |
| 87 | BLOCKER PLATE, 100 EH | 0020-34606 | AL6061-T6 | AMAT | |
| 88 | BLOCKER,PERF ,SILOX 8" | 0020-34775 | AL6061-T6 | AMAT | |
| 89 | PERF, PLATE, OX 200mm | 0020-39369 | AL6061-T6 | AMAT | |
| 90 | FACEPLATE,SiN,XG,DxZ DCVD | 0021-00041 | AL6061-T6 | AMAT | |
| 91 | FACEPLATE,TEOS,DxZ DCVD | 0021-00042 | AL6061-T6 | AMAT | |
| 92 | BLOCKER PLATE ,N2,Tin ,GIGA-FILL,SACVD | 0021-01569 | AL6061-T6 | AMAT | |
| 93 | BLOCKER PLATE ,HE,Tin ,GIGA-FILL,SACVD | 0021-01570 | AL6061-T6 | AMAT | |
| 94 | FACEPLATE,GIGA-FILL SACVD(BPSG) | 0021-01572 | AL6061-T6 | AMAT | |
| 95 | FACEPLATE,GIGA-FILL SACVD | 0021-03489 | AL6061-T6 | AMAT | |
| 96 | OBS,FACEPLATE,DxZ DCVD | 0021-09759 | AL6061-T6 | AMAT | |
| 97 | DISK,8" B101,SST,SHUTTER | 0021-20042 | SUS316 | AMAT | |
| 98 | CLAMP RING 8" HOT,SNNF | 0021-20399 | Ti | AMAT | |
| 99 | COVER,8" PEDESTAL,LOWER, B101 | 0021-20718 | SUS304 | AMAT | |
| 100 | BLOCKER,PERF,SILANE,NITRIDE550 | 0021-39748 | AL6061-T6 | AMAT | |
| 101 | LIFT PIN | 0020-34040 | AL6061-T6 | AMAT | |
| 102 | LIFT PIN | 0020-34041 | AL6061-T6 | AMAT | |
| 103 | BUFFER BLADE 8" | 0020-70285 | AL6061-T6 | AMAT | |
| 104 | SLIT V/V LINER | 0021-09718 | AL6061-T6 | AMAT | |
| 105 | BLOCKER PLATE, DxZ | 0021-09914 | AL6061-T6 | AMAT | |
| 106 | PLATE,PERF,150mm,GIANT GAP | 0020-30086 | AL6061-T6 | AMAT | |
| 107 | BLOCKER PLATE, SILANE,200mm | 0020-10936 | AL6061-T6 | AMAT | |
| 108 | BLOCKER PLATE 8" EC WxZ | 0020-42285 | AL6061-T6 | AMAT | |
| 109 | PERF, PLATE 8" ,EC WxZ | 0020-42287 | AL6061-T6 | AMAT | |
| 110 | FACEPLATE,DxZ DCVD | 0021-38119 | AL6061-T6 | AMAT | |
| 111 | FACEPLATE,(SILANE),200mm | 0021-03637 | AL6061-T6 | AMAT | |
| 112 | PUPING CHANNEL | 0021-03739 | AL6061-T6 | AMAT | |
| 113 | INSERT RING | 0021-06569 | AL6061-T6 | AMAT | |
| 114 | FACEPLATE,(SACVD),200mm | 0021-08015 | AL6061-T6 | AMAT | |
| 115 | GAS BOX,DxZ,DCVD | 0021-09760 | AL6061-T6 | AMAT | |
| 116 | PEDESTAL SHIELD 8" PRECLEAN | 0020-22844 | AL6061-T6 | AMAT | |
| 117 | CLAMP RING 8" SIX "FEET" | 0020-25279 | SUS316 | AMAT | |
| 118 | Ti PEDESTAL 8" | 0020-27123 | Ti | AMAT | |
| 119 | CLAMP RING, 6" | 0020-27944 | Ti | AMAT | |
| 120 | COVER,8" PEDESTAL,ADV-101 | 0020-28937 | SUS304 | AMAT | |
| 121 | CLAMP RING 8" SNNF,E/E,3.378mm | 0020-29015 | SUS316 | AMAT | |
| 122 | BOCKER PLATE 6","SX" TEOS OXIDE | 0020-30447 | AL6061-T6 | AMAT | |
| 123 | PEDESTAL 8" ,101,COVERAGE | 0020-24913 | SUS316 | AMAT | |
| 124 | RING,ISOLATOR,TxZ,200mm,SNNF | 0021-35749 | SUS316 | AMAT | |
| 125 | GAS DISTRIBUTION PLATE,SPUTTER | 0020-09933 | AL6061-T6 | AMAT | |
| 126 | BUFFER BLADE 6" | 0020-21114 | AL6061-T6 | AMAT | |
| 127 | HOUSING QUARTZ TUBE | 0020-30335 | ACETAL | AMAT | |
| 128 | BLADE,6" HTHU XFER | 0020-24840 | AL6061-T6 | AMAT | |
| 129 | PUPING PLATE 8", FC,WxZ | 0020-42082 | AL6061-T6 | AMAT | |
| 130 | BUFFER BLADE 8" | 0020-70285 | AL6061-T6 | AMAT | |
| 131 | INSERT BASE,ALUM,150/200mm,flat | 0020-31147 | AL6061-T6 | AMAT | |
| 132 | LIFT PIN | 0020-31633 | AL6061-T6 | AMAT | |
| 133 | SLIT V/V DOOR | 0020-32312 | AL6061-T6 | AMAT | |
| 134 | INSERT,SLIT V/V-BUFFER | 0021-02747 | AL6061-T6 | AMAT | |
| 135 | CLAMP RING, 8",SNNF,SST 3.378,AL | 0020-20112 | SUS316 | AMAT | |
| 136 | CLAMP RING, 8" HOT,SNNF,AL | 0020-24406 | Ti | AMAT | |
| 137 | CLAMP RING, 8",SEMI NOTCH, | 0021-06097 | SUS316 | AMAT | |
| 138 | CLAMP RING, 8",SNNF,TiN | 0021-06101 | SUS316 | AMAT | |
| 139 | CLAMP RING, 8",SNNF,CU, E/E 2.5 | 0021-21320 | TI | AMAT | |
| 140 | CLAMP RING 8" SNNF, SST | 0021-21936 | SUS316 | AMAT | |
| 141 | PEDESTAL 8" ,101,COVERAGE | 0021-22028 | SUS316 | AMAT | |
| 142 | COVER,RING 8" B101 Ti,10.5 | 0021-22602 | Ti | AMAT | |
| 143 | CLAMP RING, 8",SEMI NOTCH,(Ti) | 0021-06148 | SUS316 | AMAT | |
| 144 | OUTPUT MANIFOLD | 0021-10296 | AL6061-T6 | AMAT | |
| 145 | GAS BOX PLATE | 0020-30673 | AL6061-T6 | AMAT | |
| 146 | INPUT MANIFOLD | 0021-23550 | AL6061-T6 | AMAT | |
| 147 | GAS BOX(W) | 0040-32073 | AL6061-T6 | AMAT | |
| 148 | PUMPING PLATE ASS,Y ,(PTEOS) | 0190-09263 | AL6061-T6 | AMAT | |
| 149 | ADAPTOR,Hi-POWER,TTN,WB,H2O | 0040-21705 | AL6061-T6 | AMAT | |
| 150 | CHUCK 6" | 0020-21706 | AL6061-T6 | AMAT | |
| 151 | PLATE 6" CCD VAC,SEAL | 0020-23593 | AL6061-T6 | AMAT | |
| 152 | LIFTER 6" ORIENTER | 0020-41026 | AL6061-T6 | AMAT | |
| 153 | COVER,INSULATOR SOURCE 13" | 0020-20171 | G-10 | AMAT | |
| 154 | MOUNT,LIFTER BRG | 0020-20667 | AL6061-T6 | AMAT | |
| 155 | PLATE, CONTACT,DC SOURCE 13",L | 0020-21485 | BRASS | AMAT | |
| 156 | LIFT FINGER 101% TiN,WIDE BODY | 0020-23208 | SUS316 | AMAT | |
| 157 | FRAME SOURCE G3/G4, FLAT TARGET | 0020-23316 | G-10 | AMAT | |
| 158 | HEATER MOUNTING BLOCK | 0020-23437 | AL6061-T6 | AMAT | |
| 159 | LIFT HOOP 6" ,W/B CH | 0020-28258 | SUS316 | AMAT | |
| 160 | DISK 6" ADV 101 SHUTTER | 0020-28392 | Ti | AMAT | |
| 161 | DUMMY TARGET, FLAT 13" | 0020-75862 | AL6061-T6 | AMAT | |
| 162 | PEDESTAL 6" ADV 101,FULL COV, | 0021-20572 | SUS316 | AMAT | |
| 163 | CLAMP RING, 8",SNNF,Ti,3.404 | 0020-27702 | TI | AMAT | |
| 164 | PLATE,REFLECTOR,200mm,XE,CHAM | 0021-35008 | AL6061-T6 | AMAT | |
| 165 | PLATE,EDGE COVER | 0200-10169 | AL203 | AMAT | |
| 166 | CLAMP RING, 8",SNNF,PADDED,HTHU | 0020-27205 | TI | AMAT | |
| 167 | RING WAFER LIFT 200mm | 0020-10192 | SUS304 | AMAT | |
| 168 | RING WAFER LIFT | 0020-10059 | SUS304 | AMAT | |
| 169 | PLTE, PERF,OX 200mm(TEOS) | 0020-10117 | AL6061-T6 | AMAT | |
| 170 | INSERT,SLIT V/V ,SHO | 0020-19003 | AL6061-T6 | AMAT | |
| 171 | LIFT PIN | 0020-31633 | AL6061-T6 | AMAT | |
| 172 | FLANGE, ADAPTOR Z-DRIVE COOLD | 0020-39119 | AL6061-T6 | AMAT | |
| 173 | PUPING PLATE 8", SILANE | 0020-30059 | AL6061-T6 | AMAT | |
| 174 | GAS BOX,456,PL | 0040-09091 | AL6061-T6 | AMAT | |
| 175 | FILOW BLOCK BRACKET | 0040-22203 | AL6061-T6 | AMAT | |
| 176 | PUMPING PORT RING PRODUCER | 0020-08817 | TEFRON | AMAT | |
| 177 | SLIT V/V DOOR | 0020-20340 | AL6061-T6 | AMAT | |
| 178 | LIFTER HOOP 8" | 0020-22242 | AL6061-T6 | AMAT | |
| 179 | COOLIMATOR 8" | 0020-20430 | AL6061-T6 | AMAT | |
| 180 | LIFTER 8" (TC) | 0020-23387 | AL6061-T6 | AMAT | |
| 181 | SUSCEPTOR 200mm | 0020-30784 | AL6061-T6 | AMAT | |
| 182 | LIFTER HOOP 8"ADV ,101, W/B CH | 0020-27103 | SUS316 | AMAT | |
| 183 | SUSCEPTOR 150mm | 0020-30754 | AL6061-T6 | AMAT | |
| 184 | RING,SYM,GAS DIST,24PORTS,ULTIMA | 0040-04650 | AL6061-T6 | AMAT | |
| 185 | CENTER,GAS FEED BLK,TOP CLE,,ULTIMA | 0040-34339 | AL6061-T6 | AMAT | |
| 186 | LIFTER HOOP 6" ,SHUTTER | 0020-22570 | SUS316 | AMAT | |
| 187 | FRAME SOURCE G3, W/SIDE COOL'G | 0020-27808 | G-10 | AMAT | |
| 188 | LID PLATE,TxZ | 0021-35867 | AL6061-T6 | AMAT | |
| 189 | ADAPTOR ,Ti/TiN 16",CHAMB | 0040-21289 | SUS316 | AMAT | |
| 190 | ARM WELDMENT,SOURCE ,WIDE BODY | 0040-76073 | SUS316 | AMAT | |
| 191 | COVER,RING 200mm SLIP Ta(N),Ti | 0020-19708 | Ti | AMAT | |
| 192 | ORIENTAL BELLOWS | 0020-22910 | SUS330&350 | AMAT | |
| 193 | BLADE 8" SHUTTER 101 | 0020-27668 | SUS316 | AMAT | |
| 194 | EDGE RING 200mm TxZ | 0020-48700 | AL6061-T6 | AMAT | |
| 195 | DISK,8",Ti B101 PROCESS VACTRA | 0021-20437 | Ti | AMAT | |
| 196 | SHIELD,UPPER,STRAIGHT SIP II 200mm | 0021-23332 | Ti | AMAT | |
| 197 | SHIELD,UPPER,STRAIGHT SIP II 200mm | 0021-23332 | Ti | AMAT |