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MAXPLUS

CUSOTMER CENTER

Tel031-667-3975
Fax031-667-3922 Emailghyum2004@ maxpluseng.co.kr
- 월 ~ 금 : 오전9시 ~ 오후6시
- 토, 일, 공휴일 : 휴무

LAM장비

PART
No 품 명 품 번 재 질 메이커 비고
1 INNER GATE PLATE 715-12233-002 AL6061-T6 LAM  
2 GAS INJECTION RING 715-330135-001 AL6061-T6 LAM 9408
3 GAS INJECTION RING 715-330135-002 AL6061-T6 LAM  
4 GAS INJECTION RING 715-330984-001 AL6061-T6 LAM  
5 GAS INJECTION RING 715-330984-300 AL6061-T6 LAM  
6 SHAFT CYLINDER SCREW 888-107103-002 SUS304 LAM  
7 HOLDER WAFER8",TIGHT POKET 715-012165-008 AL6061-T6 LAM  
8 HOLDER WAFER6" ARM EXIT 715-130092-006 AL6061-T6 LAM  
9 COVER SCREW BSR 715-030319-001 AL6061-T6 LAM  
10 LIR,CHMBR,AL,ALLI BSR 9600 715-330825-007 AL6061-T6 LAM 9600
11 WAFER HOLDER TIGHT POKET6" 715-012165-006 AL6061-T6 LAM  
12 PENDULUM V/V WALL LINER 715-495013-001 AL6061-T6 LAM  
13 EXTENTION CHAMBER WALL LINER-II 839-495013-001 AL6061-T6 LAM  
14 RING UPPER CHAMBER FXD CAP2 715-330133-001 AL6061-T6 LAM  
15 AL ELECTRODE 715-011531-015 AL6061-T6 LAM  
16 LIN,CHABER,TRASN,MANF,ADPTR 715-495014-001 AL6061-T6 LAM  
17 FRAME CHAMBER WINDOW 715-011051-001 AL6061-T6 LAM  
18 RETAINER UNIVERSAL WINDOW 715-011039-001 AL6061-T6 LAM  
19 PENDULUM V/V PLATE 715-098591-001 AL6061-T6 LAM  
20 ISO V/V COVER 715-098592-001 AL6061-T6 LAM  
21 GATE,INR HD ANDZ 715-12233-003 AL6061-T6 LAM  
22 PL ADATER UPPER MATCH 715-330445-600 AL6061-T6 LAM  
23 CAHBER BODY SIDE PLATE EPD 715-032012-004 AL6061-T6 LAM  
24 LINER BRACKET 715-330394-001 AL6061-T6 LAM  
25 BLADE(150mm) 724-071981-002 AL5052 LAM  
26 PL,CHAMBER,TO V/V 715-360268-001 AL6061-T6 LAM  
27 WELDMT,TOP GAS LINE 839-331158-003 SUS304 LAM 9400
28 WAFER HOLDER TIGHT POKET5" 715-130080-005 AL6061-T6 LAM  
29 PLATE,LOWER BAFFLE 715-25106-001 AL6061-T6 LAM  
30 ELL CHAMBER 715-011202-001 AL6061-T6 LAM  
31 PLATE UPPER SEAL 6" 715-011532-006 AL6061-T6 LAM  
32 LOWER BAFFLE DOMED 6" 715-11901-006 AL6061-T6 LAM  
33 AL GROUND RING 715-330889-002 AL6061-T6 LAM  
34 UPPER BAFFLE DOMED 6" 715-11900-001 AL6061-T6 LAM  
35 BASE PLATE 715-074069-004 AL6061-T6 LAM  
36 EXIT ARM 6" 715-11492-006 AL6061-T6 LAM  
37 HOUSING,LOWER REACTION 715-330834-001 AL6061-T7 LAM  
38 POCUS RING 715-011640-006 AL6061-T6 LAM  
39 RAIBOOW CATHODE 715-011531-008 AL6061-T6 LAM  
40 AL CATHODE 8" 715-018991-006 AL6061-T6 LAM  
41 AL ELECTRODE 715-018991-206 AL6061-T6 LAM  
42 LINER,TMP SHILD,TOP GAS ANODIZED 715-015169-011 AL6061-T6 LAM  
43 R,EDGE,HOT 715-443178-001 SUS304 LAM  
44 CHAMBER, HIFLOW TCP 715-441352-001 AL6061-T6 LAM  
45 ORF,SYL,55HOLES DIA,052 715-370861-010 AL6061-T6 LAM  
46 BRACKET,CHAMBER,LINER,9600 715-330394-010 AL6061-T6 LAM  
47 LINER,CHAMBER,9600 715-331211-002 AL6061-T6 LAM  
48 CHAMBER WINDOW COVER 715-031454-001 AL6061-T6 LAM  
49 LINER PMP PORT O-SHAPE 715-330928-002 AL6061-T6 LAM  
50 LINER WINDOW SIDE TCP 9600 715-330981-001 AL6061-T6 LAM  
51 PLATE SOCKET SCREW 720-098325-001 TI LAM  
52 SCR,FLH,SOC,TI,VENT #8-32,1/4L 720-098325-001 TI LAM  
53 SEAL PLATE 724-074076-005 AL6061-T6 LAM  
54 HPT OUT FOCUS RING 715-443223-002 AL6061-T6 LAM  
55 BRACKET  856-004863-003 AL6061-T6 LAM