| No | 품 명 | 품 번 | 재 질 | 메이커 | 비고 |
|---|---|---|---|---|---|
| 1 | COOLING PLATE | 1810-220952-14 | AL6061-T6 | TEL | |
| 2 | COOLING PLATE (HOLE개선) | 1810-224220-12 | AL6061-T6 | TEL | S/N512494Y91211 |
| 3 | UPPER ELECTRODE | 1010-201588-12 | AL6061-T6 | TEL | |
| 4 | AL DEPO SHILD RING(P/C1) | 1810-121366-11 | AL6061-T6 | TEL | |
| 5 | AL DEPO SHILD RING(P/C2) | 1810-121367-11 | AL6061-T6 | TEL | |
| 6 | SCREW COVER A-C | 1810-326593-15 | AL6061-T6 | TEL | |
| 7 | PLATE BAFFLE | 1010-101475-11 | AL6061-T6 | TEL | |
| 8 | PLATE BLOCK | 1810-121857-12 | AL6061-T6 | TEL | |
| 9 | PLATE RF | 1810-121786-12 | AL6061-T6 | TEL | |
| 10 | SHIELD DEPO UPPER-AL P2 | 1810-121692-12 | AL6061-T6 | TEL | |
| 11 | RING,OUT | 1810-224473-13 | AL6061-T6 | TEL | |
| 12 | COVER SCREW A-AL CHAMB | 1810-328284-12 | AL6061-T6 | TEL | |
| 13 | COVER SCREW B-AL CHAMB | 1810-328284-12 | AL6061-T6 | TEL | |
| 14 | PLATE EXHAUST T6 EXH S850DI | 1810-121677-12 | AL6061-T6 | TEL | |
| 15 | SCREW | 1810-431128-11 | AL6061-T6 | TEL | |
| 16 | SLIT PLATE EXH W1.6 P3 | 1810-224611-11 | AL6061-T6 | TEL | |
| 17 | AL WALL CHAM(UP) (GND) (STEMP) | 1810-328318-11 | AL6061-T6 | TEL | |
| 18 | AL WALL CHAM(LOW) (GND) (STEMP) | 1810-328319-11 | AL6061-T6 | TEL | |
| 19 | AL WALL CHAM (L) (GND) (STEMP) | 1810-328321-11 | AL6061-T6 | TEL | |
| 20 | AL WALL CHAM (R) (GND) (STEMP) | 1810-328320-11 | AL6061-T6 | TEL | |
| 21 | RING, CENTERING TYPE-1 | 1810-224951-11 | AL6061-T6 | TEL | |
| 22 | PLATE EXHAUST T6 AN | 1810-121899-12 | AL6061-T6 | TEL | |
| 23 | LINER A EXH,AN | 1810-121591-14 | AL6061-T6 | TEL | |
| 24 | LINER B EXH | 1810-327572-14 | AL6061-T6 | TEL | |
| 25 | COVER, BELLOWS A (AD),AN | 1810-329303-11 | AL6061-T6 | TEL | |
| 26 | LINER ADAPTER (AL) TYPE 2 | 1810-329022-13 | AL6061-T6 | TEL | |
| 27 | LINER C GATE CHAMB, AN | 1810-224953-12 | AL6061-T6 | TEL | |
| 28 | COVER SCREW A-AL AN | 1810-329078-11 | AL6061-T6 | TEL | |
| 29 | COVER SCREW B-AL AN | 1810-329079-11 | AL6061-T6 | TEL | |
| 30 | SHIELD DEPO UPPER P1,AN | 1810-121903-11 | AL6061-T6 | TEL | |
| 31 | SHIELD DEPO LOWER ,AN | 1810-121898-11 | AL6061-T6 | TEL | |
| 32 | WINDOW , AL-3, AN | 1810-329064-12 | AL6061-T6 | TEL | |
| 33 | SHIELD DEPO UPPER P2 ,AN | 1810-121903-11 | AL6061-T6 | TEL |