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WIDE BODY LOADLOCK CHAMBER ASS’Y |
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SLIT VALVE ASS’Y |
BASE PEDESTAL ASS’Y |
COOLDOWN CHAMBER ASS’Y |
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EPI CHAMBER ASS’Y |
WIDY BODY CHAMBER |
WELDMENT LAMP HOUSING |
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MXP CHAMBER ASS’Y |
THROTTLE VALVE ASS’Y |
LID CHAMBER |
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CLAMP LID ASS’Y |
PRODUCER LOADLOCK CHAMBER |
CATHODE |
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CHAMBER BODY TXZ MCVD |
CHAMBER |
CHAMBER |
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Model : Shower Head Nitride Equipment : AMK P-5000 Process : CVD P/N : 0020-30709 |
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Model : Shower Head Teos Equipment : AMK P-5000 Process : CVD P/N : 0020-10117 |
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Model : Shower Head W” Equipment : AMK P-5000 Process : CVD P/N : 0020-30407 |
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Model : Chamber Equipment : AMK P-5000 Process : CVD |