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MAXPLUS

CUSOTMER CENTER

Tel031-667-3975
Fax031-667-3922 Emailghyum2004@ maxpluseng.co.kr
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PRODUCTS

Metal Parts

WIDE BODY LOADLOCK CHAMBER ASS¡¯Y

SLIT VALVE ASS¡¯Y

BASE PEDESTAL ASS¡¯Y

COOLDOWN CHAMBER ASS¡¯Y

EPI CHAMBER ASS¡¯Y

WIDY BODY CHAMBER
(SUS CHAMBER)

WELDMENT LAMP HOUSING

MXP CHAMBER ASS¡¯Y

THROTTLE VALVE ASS¡¯Y

LID CHAMBER

CLAMP LID ASS¡¯Y
(0010-05791)

PRODUCER LOADLOCK CHAMBER

CATHODE

CHAMBER BODY TXZ MCVD
(0010-05791)

CHAMBER
(0020-09497)

CHAMBER

Model : Shower Head
Nitride
Equipment : AMK P-5000
Process : CVD
P/N : 0020-30709
Model : Shower Head
Teos
Equipment : AMK P-5000
Process : CVD
P/N : 0020-10117
Model : Shower Head W¡±
Equipment : AMK P-5000
Process : CVD
P/N : 0020-30407
Model : Chamber
Equipment : AMK P-5000
Process : CVD