WIDE BODY LOADLOCK CHAMBER ASS¡¯Y |
SLIT VALVE ASS¡¯Y |
BASE PEDESTAL ASS¡¯Y |
COOLDOWN CHAMBER ASS¡¯Y |
EPI CHAMBER ASS¡¯Y |
WIDY BODY CHAMBER |
WELDMENT LAMP HOUSING |
MXP CHAMBER ASS¡¯Y |
THROTTLE VALVE ASS¡¯Y |
LID CHAMBER |
CLAMP LID ASS¡¯Y |
PRODUCER LOADLOCK CHAMBER |
CATHODE |
CHAMBER BODY TXZ MCVD |
CHAMBER |
CHAMBER |
Model : Shower Head Nitride Equipment : AMK P-5000 Process : CVD P/N : 0020-30709 |
Model : Shower Head Teos Equipment : AMK P-5000 Process : CVD P/N : 0020-10117 |
Model : Shower Head W¡± Equipment : AMK P-5000 Process : CVD P/N : 0020-30407 |
Model : Chamber Equipment : AMK P-5000 Process : CVD |