제품소개

MAXPLUS

CUSOTMER CENTER

Tel031-667-3975
Fax031-667-3922 Emailghyum2004@ maxpluseng.co.kr
- 월 ~ 금 : 오전9시 ~ 오후6시
- 토, 일, 공휴일 : 휴무

반도체 장비용 부품

PRODUCTS

Metal Parts

WIDE BODY LOADLOCK CHAMBER ASS’Y

SLIT VALVE ASS’Y

BASE PEDESTAL ASS’Y

COOLDOWN CHAMBER ASS’Y

EPI CHAMBER ASS’Y

WIDY BODY CHAMBER
(SUS CHAMBER)

WELDMENT LAMP HOUSING

MXP CHAMBER ASS’Y

THROTTLE VALVE ASS’Y

LID CHAMBER

CLAMP LID ASS’Y
(0010-05791)

PRODUCER LOADLOCK CHAMBER

CATHODE

CHAMBER BODY TXZ MCVD
(0010-05791)

CHAMBER
(0020-09497)

CHAMBER

Model : Shower Head
Nitride
Equipment : AMK P-5000
Process : CVD
P/N : 0020-30709
Model : Shower Head
Teos
Equipment : AMK P-5000
Process : CVD
P/N : 0020-10117
Model : Shower Head W”
Equipment : AMK P-5000
Process : CVD
P/N : 0020-30407
Model : Chamber
Equipment : AMK P-5000
Process : CVD