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MAXPLUS

CUSOTMER CENTER

Tel031-667-3975
Fax031-667-3922 Emailghyum2004@ maxpluseng.co.kr
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- 토, 일, 공휴일 : 휴무

NOVELUS장비

PART
No 품 명 품 번 재 질 메이커 비고
1 SHOWERHEAD,300mm ,15IN 16-132590-00 AL6061-T6 NOVELUS AL6061-T6
2 SHOWERHEAD,PINNED,300mm 16-256990-00 AL6061-T6 NOVELUS AL6061-T6
3 SHOWERHEAD,300mm ,CVD 16-289070-00 AL6061-T6 NOVELUS AL6061-T6
4 CLAMP HOUSING 15-00653-00 AL6061-T6 NOVELUS AL6061-T6
5 HEATER STRAP-SCREW 15-00457-00 Ni200 NOVELUS Ni200
6 NUT 15-00385-00 Ni200 NOVELUS Ni200
8 FEEDTHRU COPPER 15-103913-01 C3604 NOVELUS C3604
9 STRAP ,RF 15-103987-00 AL1050 NOVELUS AL1050
10 CLAMP STRAP FEEDTHRU 15-103913-02 C3604 NOVELUS C3604
11 SCREW #10-32*0.50L 15-00935-00 Ni200 NOVELUS Ni200
12 CLAMP RF STRAP 15-108307-05 AL5083 NOVELUS AL5083
13 SCREW 1/4-20*0.5L 15-114331-00 Ni200 NOVELUS Ni200
14 CUP SCREW COVER 15-108174-00 AL5083 NOVELUS AL5083
15 FORK BOTTOM PLATE 15-00700-00 AL6061-T6 NOVELUS AL6061-T6
16 FORK TOP PLATE 15-00702-00 AL6061-T6 NOVELUS AL6061-T6
17 SHOWERHEAD 6" 05-50028-00 AL6061-T6 NOVELUS AL6061-T6
19 FLANGE KEYED 15-00730-00 AL6061-T6 NOVELUS AL6061-T6
20 SHAFT SPINDLE 15-00401-00 SUS303 NOVELUS SUS303
21 PLATE RING LIFT EXCL OPTION 15-00931-00 AL7075 NOVELUS AL7075
22 INDEXER 150mm W/Ni PINS 15-052614-001 AL7075 NOVELUS AL7075
23 SINGLE GROUND STRAP 15-00216-00 AL1050 NOVELUS AL1050
24 CLAMP 15-00654-00 AL6061-T6 NOVELUS AL6061-T6
25 SCREW 1.02 LG TOP SPINDLE 15-00399-04 Ni200 NOVELUS Ni200
26 SCREW 1.12 LG TOP SPINDLE 15-00399-05 Ni200 NOVELUS Ni200
27 SCREW ,FORK 15-00698-00 Ni200 NOVELUS Ni200
28 WASHER 15-00721-00 Ni200 NOVELUS Ni200
29 WASHER 15-00386-00 Ni200 NOVELUS Ni200
30 CUP SCREW COVER 15-00951-00 AL5052 NOVELUS AL5052
31 FORK BOTTOM PLATE 6" 15-00701-00 AL6061-T6 NOVELUS AL6061-T6
32 FORK TOP PLATE 8" 15-00703-00 AL6061-T6 NOVELUS AL6061-T6
34 SHOWERHEAD 8"(W) 03-00258-00 AL6061-T6 NOVELUS AL6061-T6
35 SHOWERHEAD 6"(W) 03-00255-00 AL6061-T6 NOVELUS AL6061-T6
36 FORK TOP AL COVER 15-024881-00 AL6061-T6 NOVELUS AL6061-T6
37 INSERT ,SPLIT, OUTER,C2 15-164412-00 SUS303 NOVELUS SUS303
38 INSERT ,SPLIT, INNER,C2 15-164413-00 AL6061-T6 NOVELUS AL6061-T6
40 FORK TOP PLATE-A 15-101482-00 AL6061-T6 NOVELUS AL6061-T6
41 FORK TOP PLATE-B 15-101482-01 AL6061-T6 NOVELUS AL6061-T6
42 FORK TOP PLATE-C 15-101482-02 AL6061-T6 NOVELUS AL6061-T6
43 FORK RETAINER 17-101596-00 AL6061-T6 NOVELUS AL6061-T6
44 CLAMP PLATE 15-00729-00 AL6061-T6 NOVELUS AL6061-T6
45 FLANGE KEYED 15-032631-00 AL6061-T6 NOVELUS AL6061-T6
46 CLAMP RF STRAP 15-258837-00 AL6061-T6 NOVELUS AL6061-T6
47 WAFER LIFTER ASS,Y 15-171466-00 AL6061-T6 NOVELUS AL6061-T6