| No | 품 명 | 품 번 | 재 질 | 메이커 | 비고 |
|---|---|---|---|---|---|
| 1 | SHOWERHEAD,300mm ,15IN | 16-132590-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 2 | SHOWERHEAD,PINNED,300mm | 16-256990-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 3 | SHOWERHEAD,300mm ,CVD | 16-289070-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 4 | CLAMP HOUSING | 15-00653-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 5 | HEATER STRAP-SCREW | 15-00457-00 | Ni200 | NOVELUS | Ni200 |
| 6 | NUT | 15-00385-00 | Ni200 | NOVELUS | Ni200 |
| 8 | FEEDTHRU COPPER | 15-103913-01 | C3604 | NOVELUS | C3604 |
| 9 | STRAP ,RF | 15-103987-00 | AL1050 | NOVELUS | AL1050 |
| 10 | CLAMP STRAP FEEDTHRU | 15-103913-02 | C3604 | NOVELUS | C3604 |
| 11 | SCREW #10-32*0.50L | 15-00935-00 | Ni200 | NOVELUS | Ni200 |
| 12 | CLAMP RF STRAP | 15-108307-05 | AL5083 | NOVELUS | AL5083 |
| 13 | SCREW 1/4-20*0.5L | 15-114331-00 | Ni200 | NOVELUS | Ni200 |
| 14 | CUP SCREW COVER | 15-108174-00 | AL5083 | NOVELUS | AL5083 |
| 15 | FORK BOTTOM PLATE | 15-00700-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 16 | FORK TOP PLATE | 15-00702-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 17 | SHOWERHEAD 6" | 05-50028-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 19 | FLANGE KEYED | 15-00730-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 20 | SHAFT SPINDLE | 15-00401-00 | SUS303 | NOVELUS | SUS303 |
| 21 | PLATE RING LIFT EXCL OPTION | 15-00931-00 | AL7075 | NOVELUS | AL7075 |
| 22 | INDEXER 150mm W/Ni PINS | 15-052614-001 | AL7075 | NOVELUS | AL7075 |
| 23 | SINGLE GROUND STRAP | 15-00216-00 | AL1050 | NOVELUS | AL1050 |
| 24 | CLAMP | 15-00654-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 25 | SCREW 1.02 LG TOP SPINDLE | 15-00399-04 | Ni200 | NOVELUS | Ni200 |
| 26 | SCREW 1.12 LG TOP SPINDLE | 15-00399-05 | Ni200 | NOVELUS | Ni200 |
| 27 | SCREW ,FORK | 15-00698-00 | Ni200 | NOVELUS | Ni200 |
| 28 | WASHER | 15-00721-00 | Ni200 | NOVELUS | Ni200 |
| 29 | WASHER | 15-00386-00 | Ni200 | NOVELUS | Ni200 |
| 30 | CUP SCREW COVER | 15-00951-00 | AL5052 | NOVELUS | AL5052 |
| 31 | FORK BOTTOM PLATE 6" | 15-00701-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 32 | FORK TOP PLATE 8" | 15-00703-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 34 | SHOWERHEAD 8"(W) | 03-00258-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 35 | SHOWERHEAD 6"(W) | 03-00255-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 36 | FORK TOP AL COVER | 15-024881-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 37 | INSERT ,SPLIT, OUTER,C2 | 15-164412-00 | SUS303 | NOVELUS | SUS303 |
| 38 | INSERT ,SPLIT, INNER,C2 | 15-164413-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 40 | FORK TOP PLATE-A | 15-101482-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 41 | FORK TOP PLATE-B | 15-101482-01 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 42 | FORK TOP PLATE-C | 15-101482-02 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 43 | FORK RETAINER | 17-101596-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 44 | CLAMP PLATE | 15-00729-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 45 | FLANGE KEYED | 15-032631-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 46 | CLAMP RF STRAP | 15-258837-00 | AL6061-T6 | NOVELUS | AL6061-T6 |
| 47 | WAFER LIFTER ASS,Y | 15-171466-00 | AL6061-T6 | NOVELUS | AL6061-T6 |