| No | 품 명 | 품 번 | 재 질 | 메이커 | 비고 |
|---|---|---|---|---|---|
| 1 | CLAMP RING, LOWER SHIELD | 0020-48304 | SUS316 | AMAT | |
| 2 | COVER RING ,Ti CLEANCOAT,Ta(N) | 0020-48305 | Ti | AMAT | |
| 3 | BLOCKER,APF, PRODUCER | 0020-48891 | AL6061-T6 | AMAT | |
| 4 | FACE PLATE,APF, PRODUCER SE | 0020-49785 | AL6061-T6 | AMAT | |
| 5 | FACEPLATE,SILANENIT,PRODUCER | 0020-51923 | AL6061-T6 | AMAT | |
| 6 | BLOCKER,SILANE,RPS II, PRODUCER | 0021-12790 | AL6061-T6 | AMAT | |
| 7 | BLOCKER,LOW K, GASBOX ,PRODUCER | 0021-18725 | AL6061-T6 | AMAT | |
| 8 | FACEPLATE,BLOCK,LOWK,PRODUCER | 0021-18844 | AL6061-T6 | AMAT | |
| 9 | FACEPLATE,CTRHOLE23,SACVD | 0040-40553 | AL6061-T6 | AMAT | |
| 10 | SHIELD, LOWER 300mm PCXT/RPC | 0040-86514 | AL6061-T6 | AMAT | |
| 11 | SHIELD, INNER 300mm PC II/RPC | 0021-19342 | AL6061-T6 | AMAT | |
| 12 | GAS TRENCH COVER | 0020-22846 | AL6061-T6 | AMAT | |
| 13 | SHIELD, INNER,TxZ 300mm ,CVD | 0040-04586 | AL6061-T6 | AMAT | |
| 14 | SHIELD, OUTTER,TxZ 300mm ,CVD | 0021-07984 | AL6061-T6 | AMAT | |
| 15 | RING,EDGE PURGE GUIDED AFEOL 300mm | 0020-54284 | AL6061-T6 | AMAT | |
| 16 | DEPOSITION RING,ADV,101 300mm | 0040-07291 | Ti | AMAT | |
| 17 | SHIELD,UPPER HI-COND TIN L.G 300mm | 0021-21234 | SUS316 | AMAT | |
| 18 | COVER RING ,TTN 300mm PVD | 0021-22064 | SUS316 | AMAT | |
| 19 | SHUTTER DISK,MDP 300mm | 0021-15657 | Ti | AMAT | |
| 20 | SHIELD,UPPER LEFTABLE SHORT PVD | 0021-12555 | SUS316 | AMAT | |
| 21 | COVER RING ,ADV,101,300mm PVD | 0021-22177 | SUS316 | AMAT | |
| 22 | DISK,SHUTTER SNNF,BESC,300mm | 0021-11486 | SUS316 | AMAT | |
| 23 | DISK,SHUTTER BESC,CTR PIN, RPG,CHB | 0021-25014 | Ti | AMAT | |
| 24 | COVER RING ,300mm | 0021-16783 | Ti | AMAT | |
| 25 | UPPER SHIELD | 0021-16781 | SUS316 | AMAT | |
| 26 | MIDDLE CLAMP | 0020-26374 | SUS316 | AMAT | |
| 27 | LOWER CLAMP | 0020-02348 | SUS316 | AMAT | |
| 28 | SHOWERHEAD,UPPER,SGD,.328RA | 0040-76651 | AL6061-T6 | AMAT | |
| 29 | SHOWERHEAD,LOWER,SGD,.328RA | 0040-76652 | AL6061-T6 | AMAT |