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AMAT-300mm장비

PART
No 품 명 품 번 재 질 메이커 비고
1 CLAMP RING, LOWER SHIELD 0020-48304 SUS316 AMAT  
2 COVER RING ,Ti CLEANCOAT,Ta(N) 0020-48305 Ti AMAT  
3 BLOCKER,APF, PRODUCER 0020-48891 AL6061-T6 AMAT  
4 FACE PLATE,APF, PRODUCER SE 0020-49785 AL6061-T6 AMAT  
5 FACEPLATE,SILANENIT,PRODUCER 0020-51923 AL6061-T6 AMAT  
6 BLOCKER,SILANE,RPS II, PRODUCER 0021-12790 AL6061-T6 AMAT  
7 BLOCKER,LOW K, GASBOX ,PRODUCER 0021-18725 AL6061-T6 AMAT  
8 FACEPLATE,BLOCK,LOWK,PRODUCER 0021-18844 AL6061-T6 AMAT  
9 FACEPLATE,CTRHOLE23,SACVD 0040-40553 AL6061-T6 AMAT  
10 SHIELD, LOWER 300mm PCXT/RPC 0040-86514 AL6061-T6 AMAT  
11 SHIELD, INNER 300mm PC II/RPC 0021-19342 AL6061-T6 AMAT  
12 GAS TRENCH COVER 0020-22846 AL6061-T6 AMAT  
13 SHIELD, INNER,TxZ 300mm ,CVD 0040-04586 AL6061-T6 AMAT  
14 SHIELD, OUTTER,TxZ 300mm ,CVD 0021-07984 AL6061-T6 AMAT  
15 RING,EDGE PURGE GUIDED AFEOL 300mm 0020-54284 AL6061-T6 AMAT  
16 DEPOSITION RING,ADV,101 300mm 0040-07291 Ti AMAT  
17 SHIELD,UPPER HI-COND TIN L.G 300mm 0021-21234 SUS316 AMAT  
18 COVER RING ,TTN 300mm PVD 0021-22064 SUS316 AMAT  
19 SHUTTER DISK,MDP 300mm 0021-15657 Ti AMAT  
20 SHIELD,UPPER LEFTABLE SHORT PVD 0021-12555 SUS316 AMAT  
21 COVER RING ,ADV,101,300mm PVD 0021-22177 SUS316 AMAT  
22 DISK,SHUTTER SNNF,BESC,300mm 0021-11486 SUS316 AMAT  
23 DISK,SHUTTER BESC,CTR PIN, RPG,CHB 0021-25014 Ti AMAT  
24 COVER RING ,300mm 0021-16783 Ti AMAT  
25 UPPER SHIELD 0021-16781 SUS316 AMAT  
26 MIDDLE CLAMP 0020-26374 SUS316 AMAT  
27 LOWER CLAMP 0020-02348 SUS316 AMAT  
28 SHOWERHEAD,UPPER,SGD,.328RA 0040-76651 AL6061-T6 AMAT  
29 SHOWERHEAD,LOWER,SGD,.328RA 0040-76652 AL6061-T6 AMAT