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MAXPLUS

CUSOTMER CENTER

Tel031-667-3975
Fax031-667-3922 Emailghyum2004@ maxpluseng.co.kr
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PRODUCTS

AMAT P-5000 Process Parts

8¡± PE-CVD
Wafer Lift Hoop

6¡± CVD Gas Box

6-4¡± PE-CVD
Susceptor Plate

6¡± Nitride
Blocker Plate

6¡± PE-CVD
Susceptor Plate

6¡± CVD
Chamber Body

8¡± CVD Universal
Chamber Body

6-5¡± PE-CVD
Susceptor Plate

6¡¯ Nitride
Shower Head

8¡± PE-CVD
Blocker Plate

6¡± CVD Gas Box Gas & Water Manifold

8-6¡± PE-CVD
Susceptor Plate

8¡± Pumping Plate

8¡± TEOS
Shower Head